Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system

A TEM00, diode-pumped, Nd:YLF MOPA system has been developed, which produces 37.0W of CW and 29.0W of Q-switched power (operating at 5 kHz pulse repetition rate), with an M2 value of less than 1.2. With this Q-switched system over 14W of average power at 524 nm has been generated by second harmonic generation in LBO. Using CLBO for fourth and fifth harmonic generation, 6.6-W average power has been demonstrated at 262 nm and 2.0W at 209 nm respectively.