Old Web
English
Sign In
Acemap
>
Paper
>
Structure of Copolymer Films Created by Plasma Enhanced Chemical Vapor Deposition (PECVD)
Structure of Copolymer Films Created by Plasma Enhanced Chemical Vapor Deposition (PECVD)
2006
Someshwara Peri
Hyeonjae Kim
Mark D. Foster
Keywords:
Surface roughness
Plasma processing
Refractive index
Combustion chemical vapor deposition
Plasma-enhanced chemical vapor deposition
Atomic force microscopy
Copolymer
X-ray reflectivity
Analytical chemistry
Materials science
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]