Design of a Model-based Temperature Controller for Rapid Thermal Processor

A model-based temperature control method for rapid thermal processor system is presented in this paper.In order to simplify the nonlinear system model,the method of subsection linearization for system modeling was applied.The parameters of the model were got by a method of system identification.The controller is combined feed forward and feedback mechanisms.The feed forward mechanism is used to calculate a prediction of output of the system,so it can improve responding rapidity of control system.The feedback mechanism is used to compensate for modeling errors and disturbance.The controller has been implemented and evaluated by simulation as well as experimental equipment.