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Research on ultraviolet femtosecond pulsed laser cutting 4H-SiC
Research on ultraviolet femtosecond pulsed laser cutting 4H-SiC
2020
Yunsong Huang
yongdu Li
Yanfei Shen
Qingchun Zhao
Chen Chen
Chao Lu
Keywords:
Ultraviolet
Optoelectronics
Femtosecond pulsed laser
Materials science
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