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3D patterning of silicon with nanoporous gold
3D patterning of silicon with nanoporous gold
2018
Encarnación Torralba-Peñalver
Mathieu Halbwax
Elias Mpogui
Vincent Magnin
Joseph Harari
Jean-Pierre Vilcot
Sylvain Le Gall
Raphaël Lachaume
Christine Cachet-Vivier
Stéphane Bastide
Keywords:
Silicon
Nanotechnology
3d patterning
Nanoporous
Materials science
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