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Ion beam characterization of GaAs1-xNx and GaAs1-x-yNxBiy epitaxial layers
Ion beam characterization of GaAs1-xNx and GaAs1-x-yNxBiy epitaxial layers
2004
Wei Chih Peng
S. Tixier
J.-N. Beaudry
Martin Chicoinea
T. Tiedje
R. A. Masut
P. Desjardins
S. Francoeur
A. Mascarenhas
F. Schiettekatte
Keywords:
Rutherford backscattering spectrometry
Ion beam
Molecular beam epitaxy
Ion beam mixing
Epitaxy
Ion beam deposition
Nuclear reaction analysis
Elastic recoil detection
Analytical chemistry
Materials science
Atomic physics
Molecular physics
Correction
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