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Elemental Distribution Analysis of Semiconductor Nanostructures with Atom Probe Tomography
Elemental Distribution Analysis of Semiconductor Nanostructures with Atom Probe Tomography
2013
Yasuo Shimizu
Koji Inoue
Hisashi Takamizawa
Fumiko Yano
Yasuyoshi Nagai
Keywords:
Atom probe
Nanostructure
Nuclear magnetic resonance
Analytical chemistry
Semiconductor
Chemistry
Nanotechnology
elemental distribution
semiconductor nanostructures
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