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Electronic Structure of Cerium Oxide Gate Dielectric Grown by Plasma-Enhanced Atomic Layer Deposition
Electronic Structure of Cerium Oxide Gate Dielectric Grown by Plasma-Enhanced Atomic Layer Deposition
2011
Woo Hee Kim
W. J. Maeng
Min Kyu Kim
Julien Gatineau
Hyung Jun Kim
Keywords:
Gate dielectric
High-κ dielectric
Gate oxide
Cerium oxide
Plasma
Inorganic chemistry
Chemistry
Atomic layer deposition
Electronic structure
Analytical chemistry
Chemical engineering
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