Engineering fusion spatial modeling to enable areal measurement system analysis for optical surface metrology

Abstract Optical surface measurement (OSM) systems are able to reveal local surface variations in detail compared with stylus-based metrology. The major challenges of conducting measurement system analysis (MSA) for such an OSM include inconsistent measurement locations and a lack of characterization of gage capability at local surface areas (areal MSA). In this paper, an improved surface model is proposed to enable areal measurement system analysis for OSM by fusing surface manufacturing process information with spatially correlated data. Case studies discussed the MSA techniques developed from the proposed surface models and compared their performance in characterizing the areal MSA.