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Study on the direct current and radio frequency magnetron plasmas by the particle-in-cell/Monte Carlo method
Study on the direct current and radio frequency magnetron plasmas by the particle-in-cell/Monte Carlo method
2000
Shuji Kondo
kondou syuuzi
Keywords:
Plasma
Electric field
Particle-in-cell
Physics
Plasma processing
Plasma parameter
Monte Carlo method
Direct current
Analytical chemistry
Radio frequency
Debye sheath
Atomic physics
Materials science
Correction
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