Advanced X-ray Analytical Instrumentation Research.

Abstract : The purpose of this research was to build prototype x-ray fluorescence instrumentation to support the manufacturing of semiconductor devices for Air Force and commercial interests. Thin films of titanium nitride were chosen as the target application upon which the requirements and design were based. A state-of-the-art energy-dispersive x-ray detector and electronics were used, and a new design of focusing wavelength-dispersive spectrometer, with limited scanning, was built. Multilayer optics were designed and fabricated to distinguish nitrogen from titanium x rays. Another key requirement was for small-spot analysis. A new transmission-target x-ray tube, which used a thin-film molybdenum anode deposited directly on a thin beryllium window, was built and tested. We were able to demonstrate the predicted performance for analysis spot diameters of about 1 mm, with a performance gain of about ten times any other instrumentation currently available. This tube technology was operated at low power (only 10 watts), with a close-coupled geometric design that more than compensated for the low source flux. We have demonstrated the analysis of single-layer thin TiN films to the requirements of industry. jg p1