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Photoacid generator, chemically amplified resist material and a patterning process
Photoacid generator, chemically amplified resist material and a patterning process
2014
oohasi masaki
masaki oohasi
masahiro fukusima
ken'iti oikawa
hasegawa kouzi
kouzi hasegawa
Keywords:
Photoacid
Organic chemistry
Materials science
Resist
Chemical engineering
photoacid generator
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