Capacitive, ceramic pressure measuring cell and process for their preparation
2013
A pressure measuring cell 1 has a ceramic measuring diaphragm 2 and a ceramic counter body 4, wherein the measuring diaphragm 2 is joined to the counter body 4 to form a pressure chamber between the measuring membrane and the counter-body pressure-tight manner, wherein the pressure measuring cell 1 further comprises a capacitive transducer for detecting a pressure-dependent deformation having the measuring diaphragm 2, which at least one is arranged on the measuring diaphragm membrane electrode 8 and against at least one body-side electrode 10, 12, wherein according to the invention comprises at least one membrane electrode 2, a titanium oxide.
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