A new route for the deposition of YBaCuO thin films

Abstract A new deposition technique has been adapted to the preparation of high Tc superconductive thin films. This low cost technique is based on the pyrolysis of a thin gel obtained by polymerization of an ultrasonically generated aerosol. The ultrasonic pulverization method allows a very precise control of the deposition conditions and leads to homogeneous coatings. After calcination in air at 500°C, the layers are annealed in oxygen at temperatures ranging from 850 to 1000°C and then slowly cooled to room temperature. This method leads to superconductive thin films of 0.2 to 10 microns in thickness with a complete superconductive transition between 90K and 70K.