OES, LIF, and MS Studies of Silane, Disilane, and Chlorosilane Plasmas

Using optical emission spectroscopy (OES), mass spectrometry (MS), and laser-induced fluorescence (LIF), we are investigating a number of glow-discharge reactions as a function of RF power, flow rates, partial pressures, and H2 dilution under realistic thin-film deposition conditions. In this paper we report on the preliminary results of two studies: