Two-Dimensional Beam Steering in Optical Phased Array with Grating Array Superlattices

In this paper, we designed and fabricated an optical phased array with a narrow antenna spacing in silicon on insulator. The crosstalk is reduced substantially with a spacing of only 0.9 μm between antennas using superlattice grating waveguides. A transversal 24.2° beam steering range was observed in the far-field of view by tuning the voltages on each channel. Meanwhile, by sweeping the wavelength from 1540 to 1570 nm, the main beam can scan in a range of 6.45° in the longitudinal direction.