Device and method for repairing masks and evaporation system

The invention provides a device and a method for repairing masks and an evaporation system, and relates to the technical field of masks. By the aid of the device, the method and the evaporation system, the problem that existing masks need to be taken out of evaporation chambers when about to be repaired at present can be solved. The device for repairing the masks comprises a repairing device and a moving mechanism. The moving mechanism is used for driving the repairing device to move in regions opposite to the metal masks and planes parallel to the metal masks; the repairing device is used for repairing portions, which are opposite to the repairing device, on the metal masks. The device and the method are applied to repairing the masks.