Gas circulation system for excimer laser

The invention discloses a gas circulation system for an excimer laser. The gas circulation system of the excimer laser is used for circulating work gas of the excimer laser. A gas inlet pipeline and a gas outlet pipeline are arranged in a cavity of the excimer laser; the gas circulation system comprises a condenser (1), an oxygen supply device (2), a compressor (3) and a gas storage chamber (4); the gas storage chamber (4) is connected with the gas outlet pipeline, the condenser (1) and the oxygen supply device (2) respectively through valves; the oxygen supply device (2) is used for supplying oxygen to the gas storage chamber (4); the gas storage chamber (4) is used for enabling the oxygen and working gas from the cavity to react sufficiently to produce reaction gas; the condenser (1) refrigerates the reaction gas to remove impurities and outputs uncondensed gas, and the compressor (3) sucks the uncondensed gas from the condenser (4) and conveys the uncondensed gas to the cavity. The gas circulation system can effectively prolong the service life of the work gas, and the situation that output energy is reduced due to the fact that other gas is added in the purification process is avoided.