Nonlinearity of hermetically encapsulated high-Q double balanced breathe-mode ring resonator

We present a hermetically encapsulated breathe-mode ring resonator with very high quality factor (∼473,000) and frequency at 10.65 MHz and 13.29 MHz. The resonator's nonlinear behavior is experimentally characterized and theoretically analyzed for the first time. The maximum current handling is measured and verified using two different methods. We find that material nonlinearity (nonlinear Young's modulus of silicon) limits the device's maximum output current. The theoretical analysis presented here is valid for any type of MEMS resonators, and the results provide guidance for future design of high current handling devices.