Modified Model for Static Behavior of Microcantilever Gas Sensor Adsorbed with Monolayer Molecules

The modified static bending model of microcantilever with monolayer molecules has been established based on energy method, in which the change in neutral layer position caused by adsorption-induced stress has been considered. On this basis, we have analyzed the relationship between the bending curvature radius of a microcantilever with its thickness, Young’s modulus and molecule-molecule distance of adsorbed molecules when it is adsorbed with monolayer water molecules. Additionally, we have investigated the effect of change in neutral layer position on the static behavior of microcantilever sensors and have found that: 1) the bending curvature radius of microcantilever is affected by its Young’s modulus, thickness and distance of adsorbed molecules respectively; 2)the predicted error of bending curvature radius caused by the change in neutral layer position slightly increases with decreasing Young’s modulus and thickness, whereas the effect of distance between adsorbed molecules on the error is significant.