Fabrication of Color Separation Grating Used for ICF Drivers

The design principle and the fabrication process of color separation gratings are studied.The 300 μm period CSG in a fused silica substrate(100 mm×100 mm) was fabricated by using a lithographic process and the ion-beam etching with beam energy of 450 eV and beam density of 80 mA/mc2 at 30 ° angle of incidence.The normalized 3 ω zeroth-order transmission efficiency of CSG is measured about 91.9%.The results show that it is feasible to fabricate CSG with high diffraction efficiency by the fabrication process which offers great dimensional control and steeper pattern sidewall,and it gives some useful references to fabrication the CSG with higher diffraction efficiency.