Modeling, Characterization and Analysis of a Microfabricated Piezoelectric Cantilever for Vibration Sensing and Energy Harvesting

A piezoelectric micro-cantilever, with potential applications for vibration sensing and energy harvesting, was designed for a standard industry process. Its expected sensitivity for vibration intensity and power generation capability were simulated using a simplified one-dimensional model. The device was fabricated and a sample was prepared for testing, where experiments have been carried out to measure the resonance frequency, the damping coefficient and to derive the frequency response and the voltage vs vibration intensity plots. The experimental results were compared to the analytical model and semi-empirical corrections were made to improve the predicted behavior. Based on the obtained results, an assessment of the device capabilities and potential application is given.