Einfache Modelle zur Simulation der Abbildung 3-dimensionaler Strukturen

The propagation of light between the different object planes is characterized by Fresnel diffraction; optical effects at the walls of the structure were not considered. It could be shown, that the interpretation of Hopkins-Formula of partially, coherent defocused imaging corresponds with the real results of imaging 3-D structures. Reflections on the validity of our theory were made