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p-Type Cz-Si PERC-Type Solar Cells Applying PECVD Aluminium Oxide Rear Surface Passivation
p-Type Cz-Si PERC-Type Solar Cells Applying PECVD Aluminium Oxide Rear Surface Passivation
2010
R. Preu
Jochen Rentsch
D. Biro
N. Kohn
L. Gautero
M. Hofmann
L Weiss
E. Billot
D. Kania
Pierre Saint-Cast
Keywords:
Passivation
Aluminium oxide
Plasma-enhanced chemical vapor deposition
Materials science
Metallurgy
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