Development of GaAs Hyperabrupt Schottky Varactor Diode using Ion-Implanted Active Layer on SI GaAs

We report here the fabrication of ion implanted GaAs hyperabrupt varactor diode that can be integrated in MMIC process. Varactor diodes with constant sensitivity γ of 0.55–0.65 with Cmax/Cmin varying from 2.5 to 3.5 have been fabricated. Varactors diode geometries with different anode lengths, anode width, single and multiple finger anodes with device area varying from 50 to 6,000 μm2 were fabricated. The breakdown voltage of >10 V have been obtained for all the different value capacitors ranging from 0.16 to 11.2 pF.