Hybrid three-dimensional sensor array, in particular for measuring electrogenic cell arrangements, as well as measuring arrangement

The invention relates to a hybrid three-dimensional sensor array, in particular for measuring biological cell arrays. The sensor array has a plurality of micro-structured sensor plates (1), each with a support section (2) are arranged comb-like to which a plurality of probe needles (3) carry a plurality of electrode pads (4). Furthermore, a plurality of spacer elements (11) are provided which are secured between the sensor plates (1) so that both the support portions (2) and the probe needles (3) of adjacent sensor plates (1) are spaced apart. The invention also relates to a measuring arrangement for measuring electrical activity of biological cell arrays with such a sensor array.