MEMS FTIR Parallel Spectrometer for Non-Invasive Skin Biochemistry Analysis

Abdelrahman M. Salem,Alaa Fathy,Ahmed M. Othman,Yasser M. Sabry,Diaa Khalil

MEMS FTIR Parallel Spectrometer for Non-Invasive Skin Biochemistry Analysis

2021

Abdelrahman M. Salem
Alaa Fathy
Ahmed M. Othman
Yasser M. Sabry
Diaa Khalil

MEMS FTIR parallel-core spectrometer is presented for biochemistry analysis. The fabricated chip comprising 2 interferometers shows an SNR of about 1000:1 on the human skin using diffuse reflectance interface and a single photodetector.

Keywords:

Astronomical interferometer
non invasive
Chip
Biochemistry
Microelectromechanical systems
Diffuse reflection
Materials science
Fourier transform infrared spectroscopy
Photodetector
Spectrometer

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