Strain modification in coherent Ge and SixGe1-x epitaxial films by ion-assisted molecular beam epitaxy

We have observed large changes in Ge and SixGe1−x layer strain during concurrent molecular beam epitaxial growth and low‐energy bombardment. Layers are uniformly strained, coherent with the substrate, and contain no dislocations, suggesting that misfit strain is accommodated by free volume changes associated with injection of ion bombardment induced point defects. The dependence of layer strain on ion energy, ion‐atom flux ratio, and temperature is consistent with the presence of a uniform dispersion of point defects at high concentration. Implications for distinguishing ion‐surface interactions from ion‐bulk interactions are discussed.