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Spatially Resolved Analysis of Selectively Doped Regions via Confocal Raman Microscopy
Spatially Resolved Analysis of Selectively Doped Regions via Confocal Raman Microscopy
2014
Axel Herguth
Jan Ebser
Sibylle Ohl
Barbara Terheiden
Giso Hahn
Keywords:
Boron
Raman spectroscopy
Confocal
Microscopy
Doping
Analytical chemistry
Materials science
Optics
spatially resolved
Correction
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