Device for processing silicon carbide sealing ring type part through atmosphere plasma

Atmospheric plasma processing a silicon carbide seal ring Parts of the apparatus, which belongs to the technical field of plasma processing a silicon carbide seal ring type parts. It is difficult to solve the problem of processing a silicon carbide seal ring type parts. Set its upper end face of the disk-shaped electrode holder has a plurality of mounting holes of the sheet-shaped electrode module, when the sheet-shaped electrode module is mounted on the mounting hole of the disk-shaped electrode holder, the sheet-shaped electrode and the disc-shaped electrode module each end surface of the surface to be processed under the sheet-shaped electrode sheets are close to the module to be machined silicon carbide seal ring type parts; co-linear where the diameter of the bobbin, the sheet-shaped electrode selection module according to the type of surface to be processed number of requirements. The present invention can be relatively high demands on those surfaces of the processing more difficult, and requires many steps to complete the seal ring Parts uniform surface processing to remove large and small chipping partially removed, the final etched microstructure high precision, high-efficiency machining.