Old Web
English
Sign In
Acemap
>
Paper
>
Combined Effects of Supersaturation and Stress for the Control of AlN Film Quality
Combined Effects of Supersaturation and Stress for the Control of AlN Film Quality
2017
Raphaël Boichot
Danying Chen
Frederic Mercier
Mikhail Chubarov
Elisabeth Blanquet
Michel Pons
Gael Gusti
Keywords:
Chemical engineering
Supersaturation
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]