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Detecting sub-terahertz mechanical oscillations by a GaAs MEMS thermal sensor
Detecting sub-terahertz mechanical oscillations by a GaAs MEMS thermal sensor
2019
Ya Zhang
Shaoqing Du
Boqi Qiu
Kazuhiko Hirakawa
Keywords:
Materials science
Microelectromechanical systems
thermal sensors
Optoelectronics
Terahertz radiation
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