An advanced bipolar-MOS-I 2 L technology with a thin epitaxial layer for analog-digital VLSI

A novel Bi-MOS technology, Advanced Bipolar CMOS (ABC), is proposed. Bipolar transistors (n-p-n, p-n-p, I 2 L) and MOS transistors (both n- and p-channel) have been successfully fabricated on the same chip with no decrease in performance by using a 3-µm design rule. Thin epitaxial layer ( \leq 2 \micro m) is used in order to obtain small-size high-performance (3-GHz) bipolar devices. Device size is reduced by using a shallow junction and self-aligning technique. n-channel MOS transistors are formed in p-well regions designed to reach p-type substrate, and p-channel MOS transistors are formed in epitaxial layer with an n + buried layer. This technology has the potential for monolithic multifunctional analog-digital VLSI.