Theoretical simulations of SAW based sensor on PVDF

Abstract In this modern era of industrialization, sensor technology has grown rapidly. Among many others, Surface Acoustic Wave (SAW) based sensors have expanded due to their miniaturized dimensions, quick response, durability and stability of fundamental frequency. SAW based sensors can be used for the sensing of gases, liquids, chemical agents and biomolecules as well. Additionally, the wearable technology is emerging now a days in biomedical sector. This invites the role of flexible polymers as a substrate for the fabrication of SAW based sensors. Polyvinylidene fluoride (PVDF) is a polymer exhibiting a very good piezoelectricity, which is a key requirement for the fabrication of SAW based devices. To avoid the cumbersome and time consuming experimental optimization of a device, it is wise to model and simulate the device theoretically. In the present work, a PVDF based flexible membrane of 100micron thickness is being designed. It’s response towards any analyte, which causes mass loading effect to the membrane is being studied theoretically. The fundamental frequency of the device was found to be 9 MHz. The coupling coefficient of the device was also being studied to ensure good sensitivity of the device. Finite element simulations to determine the optimum parameters are being performed using COMSOL Multiphysics.