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Reduction of Surface Cracks in β-FeSi2 Films by Substrate Heating during RF-Sputtering Deposition
Reduction of Surface Cracks in β-FeSi2 Films by Substrate Heating during RF-Sputtering Deposition
2013
Yusuke Nishikawa
Keiichiro Hiehata
Kazuhiro Nakamura
Keywords:
Substrate (chemistry)
Sputter deposition
Silicide
Metallurgy
Materials science
Correction
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