Measuring the Oxygen Diffusion in C-Axis Oriented ErBa2Cu3Ox Films Using In Situ X-ray Diffraction Technique

An in situ X-ray technique was used to study the diffusion of oxygen in c-axis oriented ErBa2Cu3Ox films made by rf magnetron sputtering. The diffusion is mainly parallel to the c-axis of the film, and the coefficients for oxygen diffusion are estimated to be in the order of 10-14 and 10-12 cm2s-1 at annealing temperatures of 500°C and 900°C, respectively.