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Plasma nitridation of atomic layer deposition-Al2O3 by NH3 in PECVD
Plasma nitridation of atomic layer deposition-Al2O3 by NH3 in PECVD
2016
Ham cho rom Cha
Young Joon Cho
Hyo Sik Chang
Keywords:
Analytical chemistry
Plasma
Plasma processing
Plasma-enhanced chemical vapor deposition
Atomic layer deposition
Ceramic materials
Materials science
plasma nitridation
Optoelectronics
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