Dry-process recycling method for chloro-silicane-containing slurry in polycrystalline silicon production process

2015 
The invention discloses a dry-process recycling method for chloro-silicane-containing slurry in a polycrystalline silicon production process. The dry-process recycling method comprises the following steps: step I, performing rotary evaporation: feeding chloro-silicane-containing slurry into a dryer, starting a rotary stirrer on the end head of the dryer, continuously rotating and stirring chloro-silicane slurry in tube pass of the dryer, introducing low-pressure steam into a dryer jacket, continuously transmitting heat to the chloro-silicane slurry in tube pass of the dryer, and evaporating low-boiling-point chloro-silicane of the chloro-silicane slurry into a gas; step II, condensing and recycling: introducing the chloro-silicane gas into the top of a recycling tank to perform first-stage condensation and then perform second-stage condensation, discharging residual uncondensed gas to waste gas, refluxing chloro-silicane liquid obtained by the first-stage condensation and the second-stage condensation to a recycling storage to store. Through the rotary evaproaition, solid-liquid separation of slurry is realized, useful chloro-silicane is recycled, the effective utilization rate of the resources is increased, the emission of waste alkaline water further can be reduced, the producing and processing cost is greatly reduced, and dual safe and economic benefits are achieved.
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