NEXAFS study on the local structures of DLC thin films formed by Ar cluster ion beam assisted deposition

Near‐edge X‐ray absorption fine structure (NEXAFS) spectra were measured for the optimization of synthesis conditions on the production of diamond‐like carbon (DLC) thin films by the Ar gas cluster ion beam (GCIB) assisted deposition of fullerene. The sp2 contents of DLC films were estimated from the analysis of the peak corresponding to the transition of the excitation electron from a carbon 1s orbital to a π* orbital in the NEXAFS spectrum of the carbon K‐edge over the excitation energy range 275–320 eV. Substrate temperature and Ar cluster ion acceleration voltage in the synthesis conditions of DLC films were optimized to make the sp2 content minimum.