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Method and apparatus for the deposition of functional coatings on a substrate by plasma-enhanced deposition layer
Method and apparatus for the deposition of functional coatings on a substrate by plasma-enhanced deposition layer
1995
Werner Grimm
Heiner Vollstaedt
Hans Joachim Scheibe
Keywords:
Thin film
Hybrid physical-chemical vapor deposition
Ion plating
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Plasma
Atomic layer deposition
Pulsed laser deposition
Analytical chemistry
Materials science
Chemical engineering
Deposition (law)
Correction
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