Old Web
English
Sign In
Acemap
>
Paper
>
Fabrication MEMS platform for sensors applications by laser micro engraving
Fabrication MEMS platform for sensors applications by laser micro engraving
2015
Ivanova Anastasia
Konstantin Oblov
Sergey Soloviev
Nikolay Samotaev
B. Gurkovskiy
V. Mironov
Keywords:
Microelectromechanical systems
Materials science
Fabrication
Optoelectronics
Engraving
Laser
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]