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Silicide Synthesis by Fe+ Implantation in Si Substrates
Silicide Synthesis by Fe+ Implantation in Si Substrates
2015
Yasushi Hoshino
yasusi hosino
Gosuke Yachida
Tomoaki Yoneda
Jyoji Nakata
jouzi nakada
Keywords:
Ion implantation
Silicide
Semiconductor
Inorganic chemistry
Materials science
Optoelectronics
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