Variable growth modes of CaF2 on Si(111) determined by x‐ray photoelectron diffraction

Chemical discrimination of bulk and interface Ca 2p x‐ray photoelectron diffraction modulations is used to identify three growth regimes during the initial stages of CaF2 epitaxy on Si(111). Low flux, high temperature conditions produce island growth atop a nonwetting, chemically reacted Ca‐F interface layer. Changing the growth kinetics by increasing the flux produces more laminar growth. Lowering the substrate temperature produces a more stoichiometric CaF2 interface layer that results in immediate wetting and laminar growth.