Torsional mirror with X-shaped cross-sectional torsional beam

The development of a MEMS torsional mirror with X-shaped cross-sectional torsional beam is presented in this paper. The torsional resonant mode of the torsional mirror was designed to be the lowest resonant mode. Therefore, vertical and horizontal movements of the mirror were reduced. This torsional mirror has been fabricated using anisotropic etching from both sides of Si (100) wafer.