IC rewiring by laser microchemistry

ICs interconnection networks can be locally modified using a tightly focused laser beam to induce chemical reactions on the circuit surface. Owing to the precursor used, conductors and insulators can either be etched or deposited within the laser spot. Bertin & Co. have recently developed a line of laser-assisted tools dedicated to VLSI prototypes rewiring. This paper summarizes the tests performed on various technology devices from major IC manufacturers: IBM, STM, and Texas Instruments. The different repair steps and results of the characterization tests are presented.© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.