Reference Vibration analysis of Piezoelectric Micromachined Modal Gyroscope

Piezoelectric Micromachined Modal Gyroscope (PMMG) researched in the paper is a novel kind of angular rate sensor, which is based on high order resonant mode of a piezoelectric body as its reference vibration. Three methods, finite element method (FEM), scanning vibrometer and impedance analyzer, were applied to analyze the reference vibration. Reference resonant mode and the modal frequency and modal shape were obtained. Vibrating shape and resonant frequency were visualized and measured through scanning vibrometer equipment. Impedance analyzer was used in the equivalent circuit analysis. Reference vibrating frequencies obtained from mentioned methods are almost same, which are 343.500 kHz, 346.094 kHz and 347.316 kHz respectively. The work of the paper provides the theoretical and experimental foundation for improving performance of PMMG.