Carbon nanometer tube film ionization type gas humidity sensor and humidity measurement method thereof

The invention discloses a carbon nanometer tube film ionization type gas humidity sensor and a humidity measurement method thereof. The sensor comprises a first electrode, a second electrode and a third electrode which are distributed in sequence, wherein the first electrode is provided with a breather hole, and a metal film substrate on which carbon nanometer tube films are distributed is adhered onto the inner surface of the first electrode; a leading-out hole is formed in the center of the second electrode; a blind hole is formed on the plate surface of the third electrode; and the three electrodes are isolated from one another. The method comprises the following steps: firstly, placing the gas humidity sensor; secondly, applying a voltage on the electrodes; thirdly, measuring the values of ion flows outputted by the sensor; fourthly, making samples of the measured values and gas humidity calibration values, and establishing a gas humidity measurement database with the samples andinterpolated samples; fifthly, establishing a data fusion instrument and a gas humidity measurement model; and sixthly, inputting the measured values of the sensor into the measurement model to obtain the accurate gas humidity measurement value. The gas humidity sensor has low working voltage, as well as high gas humidity measurement sensitivity, linearity and accuracy, and can be used for humidity measurement of various gases.