Device and method for preventing wafer test probe station from pin collision

2016 
The invention provides a device and method for preventing a wafer test probe station from pin collision. Multiple distance sensors are uniformly arranged on the side wall of an electronic sucker and used for detecting the distance between the electronic sucker and a probe card, if the distance between the probe card and the electronic sucker is detected to be smaller than the safe distance, a signal is sent to the probe station, the probe station stops moving the electronic sucker and restores the electronic sucker to the safe distance, and thereby the situation that probes are bent or damaged due to collision between the probe card and the electronic sucker is avoided.
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