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High conductive carbon film deposition by electron cyclotron resonance (ECR) plasma
High conductive carbon film deposition by electron cyclotron resonance (ECR) plasma
2021
Hansin Bae
Hamaguchi Ikumi
Kensuke Sasai
Haruka Suzuki
Hirotaka Toyoda
Keywords:
Materials science
Plasma
Plasma-enhanced chemical vapor deposition
Electrical conductor
Electron cyclotron resonance
Optoelectronics
Deposition (chemistry)
Carbon film
Correction
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