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The electrical characteristics analysis of SiOxNy ARC for sub-0.17 Gigabit DRAM
The electrical characteristics analysis of SiOxNy ARC for sub-0.17 Gigabit DRAM
2001
Chihoon Lee
Nak-Jin Son
Sun-Cheol Hong
Seung-Moo Lee
Donggun Park
Won Hee Jang
Tae-Hyun An
Wonshik Lee
Keywords:
Arc (geometry)
Leakage (electronics)
Gigabit
Electrical engineering
Electronic engineering
Dram
Materials science
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